PLASMA POLYMERIZED METHYL-METHACRYLATE AS AN ELECTRON-BEAM RESIST

被引：63

作者：

MORITA, S ^{[1
]}

TAMANO, J ^{[1
]}

HATTORI, S ^{[1
]}

IEDA, M ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT ELECT ENGN,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 07期

关键词：

D O I：

10.1063/1.328170

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3938 / 3941

页数：4

共 21 条

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