250-A LINEWIDTHS WITH PMMA ELECTRON RESIST

被引：145

作者：

BROERS, AN

HARPER, JME

MOLZEN, WW

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 05期

关键词：

D O I：

10.1063/1.90387

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：392 / 394

页数：3

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