ATOMIC-FORCE MICROSCOPE AS A TOOL FOR METAL-SURFACE MODIFICATIONS

被引:39
作者
GOBEL, H
VONBLANCKENHAGEN, P
机构
[1] Inst fuer Materialforschung I, Karlsruhe
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.588245
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Atomic force microscopy has been used for direct surface modification and imaging of bulk polycrystalline Au, thin Au films, and a microstructure. Single surface scratches and periodic profiles as well as more complicated structures have been produced. The underlying process is discussed in terms of abrasive wear such as microploughing and microcutting as well as of the temperature rise during modification. In the case of plastic deformation and slow sliding one can estimate a temperature increase of about 0.6 μK for typical structurization parameters. The method described here is promising as regards the structurization of various materials and fundamental studies in tribology.
引用
收藏
页码:1247 / 1251
页数:5
相关论文
共 24 条
[11]   THE ATOMIC FORCE MICROSCOPE USED AS A POWERFUL TOOL FOR MACHINING SURFACES [J].
JUNG, TA ;
MOSER, A ;
HUG, HJ ;
BRODBECK, D ;
HOFER, R ;
HIDBER, HR ;
SCHWARZ, UD .
ULTRAMICROSCOPY, 1992, 42 :1446-1451
[12]   MACHINING OXIDE THIN-FILMS WITH AN ATOMIC FORCE MICROSCOPE - PATTERN AND OBJECT FORMATION ON THE NANOMETER SCALE [J].
KIM, Y ;
LIEBER, CM .
SCIENCE, 1992, 257 (5068) :375-377
[13]   THEORY OF DECAY OF A SURFACE SCRATCH TO FLATNESS [J].
KING, RT ;
MULLINS, WW .
ACTA METALLURGICA, 1962, 10 (JUN) :601-&
[14]   NANOMECHANICS AND DYNAMICS OF TIP SUBSTRATE INTERACTIONS [J].
LANDMAN, U ;
LUEDTKE, WD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :414-423
[15]   TRIBOSCOPIC DESCRIPTION OF LOCAL WEAR PHENOMENA UNDER AN AFM TIP [J].
LOUBET, JL ;
BELIN, M ;
DURAND, R ;
PASCAL, H .
THIN SOLID FILMS, 1994, 253 (1-2) :194-198
[16]   THEORY OF THERMAL GROOVING [J].
MULLINS, WW .
JOURNAL OF APPLIED PHYSICS, 1957, 28 (03) :333-339
[17]   THE AFM AS A TOOL FOR SURFACE IMAGING [J].
QUATE, CF .
SURFACE SCIENCE, 1994, 299 (1-3) :980-995
[18]   REVIEW OF SCANNING FORCE MICROSCOPY [J].
SARID, D ;
ELINGS, V .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :431-437
[19]  
Sarid D., 1991, SCANNING FORCE MICRO
[20]   MICROMACHINING OF METAL-SURFACES BY SCANNING PROBE MICROSCOPE [J].
SUMOMOGI, T ;
ENDO, T ;
KUWAHARA, K ;
KANEKO, R ;
MIYAMOTO, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03) :1876-1880