PHOTOCONDUCTIVE A-SI-H WITH DOMINANT MONOHYDRIDE BONDING PREPARED BY DC-MAGNETRON SPUTTERING

被引：14

作者：

DRUSEDAU, T

ECKLER, M

BINDEMANN, R

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1988年 / 108卷 / 01期

关键词：

D O I：

10.1002/pssa.2211080129

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 293

页数：9

共 21 条

[1]

ECKLER K, IN PRESS

[2] A-SI THIN-FILM GROWTH BY SPUTTERING - A MONTE-CARLO STUDY [J].

FERRON, J ;

KOROPECKI, RR ;

ARCE, R .

PHYSICAL REVIEW B, 1987, 35 (14) :7611-7617

[3]

HEISIG U, 1978, 6 P TAG PHYS TECHN H, P48

[4]

JOANNOPOULOS JD, 1984, TOPICS APPL PHYS, V55

[5] DEPOSITION OF A-SI-H BY MAGNETRON SPUTTER-ASSISTED PLASMA-CVD - PREPARATION AND PHYSICAL-PROPERTIES [J].

KOTTWITZ, A ;

FUCHS, M ;

SCHADE, K ;

BINDEMANN, R ;

DRUSEDAU, T ;

GERLACH, W .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 93 (2-3) :230-240

[6]

MARTIN PM, 1981, AIP C P, V52, P73

[7]

MULLER W, 1984, THESIS U KAISERSLAUT

[8]

PANKOVE JI, 1984, SEMICONDUCT SEMIMET, V21, P1

[9]

PANKOVE JI, 1984, SEMICONDUCTORS SEM A, V21, P55

[10] MICROSTRUCTURE AND PROPERTIES OF RF-SPUTTERED AMORPHOUS HYDROGENATED SILICON FILMS [J].

ROSS, RC ;

MESSIER, R .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) :5329-5339

← 1 2 3 →