A-SI THIN-FILM GROWTH BY SPUTTERING - A MONTE-CARLO STUDY

被引：7

作者：

FERRON, J

KOROPECKI, RR

ARCE, R

机构：

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 14期

关键词：

D O I：

10.1103/PhysRevB.35.7611

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：7611 / 7617

页数：7

共 23 条

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