THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE MAGNETIC-PROPERTIES OF FEALN THIN-FILMS FOR RECORDING-HEADS

被引：14

作者：

BAIN, JA

KRYDER, MH

机构：

[1] Carnegie Mellon University, Pittsburgh

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1995年 / 31卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/20.490098

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The soft magnetic properties of FeAlN films have been shown to be strongly dependent on the temperature of the substrate during deposition. Films of FeAlN were sputtered deposited onto Alumina/Titanium Carbide (ALTIC) ceramic substrates at substrate temperatures between 20 and 200 degrees C. In the range of 150 to 200 degrees C, the films display a well oriented easy axis with coercivities less than 1.5 Oe, and a hard axis coercivity of less than 1 Oe. Deposition at temperatures below 150 degrees C resulted in high coercivities and no in-plane anisotropy. This behavior is explained in terms of the temperature dependence of the formation of the gamma'-Fe4N phase (identified by x-ray diffraction), which is necessary for the soft magnetic properties. A discussion of heating transients due to substrate thermal mass is also included.

引用

页码：2703 / 2705

页数：3

共 12 条

[1] GRAIN-SIZE DEPENDENCE OF COERCIVITY AND PERMEABILITY IN NANOCRYSTALLINE FERROMAGNETS [J].

HERZER, G .

IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1397-1402

[2] ON THE THEORETICAL UNDERSTANDING OF NANOCRYSTALLINE SOFT MAGNETIC-MATERIALS [J].

HERZER, G .

JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 1993, 2 (02) :193-197

[3] THE EFFECTS OF DEPOSITION PARAMETERS ON IRON FILMS RF DIODE SPUTTERED IN ARGON-NITROGEN [J].

JONES, RE ;

WILLIAMS, J ;

STAUD, N .

IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1456-1458

[4] SOFT MAGNETIC FE-AL-N/SI-N MULTILAYERED FILM WITH HIGH THERMAL-STABILITY [J].

KATORI, K ;

HAYASHI, K ;

HAYAKAWA, M ;

ASO, K .

APPLIED PHYSICS LETTERS, 1989, 54 (12) :1181-1182

[5]

KATORI K, 1989, J MAG SOC JAPAN, V13, P335

[6] EVOLUTION OF MICROSTRUCTURE OF NITROGEN ION-IMPLANTED IRON AT HIGH-TEMPERATURES [J].

RAUSCHENBACH, B .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 53 (01) :35-45

[7] MICROSTRUCTURAL INVESTIGATIONS OF FEN AND FEALN THIN-FILMS FOR RECORDING HEAD APPLICATIONS [J].

ROGERS, DJ ;

WANG, S ;

LAUGHLIN, DE ;

KRYDER, MH .

IEEE TRANSACTIONS ON MAGNETICS, 1992, 28 (05) :2418-2420

[8]

Takahashi S., 1989, IEEE Translation Journal on Magnetics in Japan, V4, P480, DOI 10.1109/TJMJ.1989.4564037

[9] RF-DIODE-SPUTTERED IRON NITRIDE FILMS FOR THIN-FILM RECORDING HEAD MATERIALS [J].

WANG, S ;

KRYDER, MH .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) :5134-5136

[10] IMPROVED HIGH MOMENT FEALN/SIO2 LAMINATED MATERIALS FOR THIN-FILM RECORDING-HEADS [J].

WANG, S ;

OBERMYER, KE ;

KRYDER, MH .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :4879-4881

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