COMPUTER MODELING FOR ION-BEAM SYSTEM-DESIGN

被引:7
作者
ITO, H
WHITE, NR
机构
[1] Applied Materials Implant Division, Horsham
关键词
D O I
10.1016/0168-583X(91)96225-A
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The design of ion-beam transport systems based on computer modelling is discussed and some typical examples are presented. Integrated modelling work involves beam envelope programs to design overall systems, Poisson or Laplace solutions to calculate electric and magnetic fields in the system, ray-trace programs to see the collective movement of charged particles, plasma solutions for the consideration of the target environment and plasma-simulation programs to predict possible microscopic interactions between charged species and the fields. Experimental checks to assure the performance of the beam-line components are also given and explained. These are used as a means of making more accurate predictions in the future.
引用
收藏
页码:527 / 532
页数:6
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