ANALYSIS OF ION-IMPLANTED GAAS BY SPECTROSCOPIC ELLIPSOMETRY

被引：54

作者：

ERMAN, M

THEETEN, JB

机构：

来源：

SURFACE SCIENCE | 1983年 / 135卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(83)90229-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：353 / 373

页数：21

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