INTERLABORATORY DETERMINATION OF THE CALIBRATION FACTOR FOR THE MEASUREMENT OF THE INTERSTITIAL OXYGEN-CONTENT OF SILICON BY INFRARED-ABSORPTION

被引：141

作者：

BAGHDADI, A

BULLIS, WM

CROARKIN, MC

LI, YZ

SCACE, RI

SERIES, RW

STALLHOFER, P

WATANABE, M

机构：

[1] SILTEC CORP,MENLO PK,CA 94025

[2] NATL INST STAND & TECHNOL,DIV STAT ENGN,GAITHERSBURG,MD 20899

[3] SHANGHAI INST MET,SHANGHAI,PEOPLES R CHINA

[4] NATL INST STAND & TECHNOL,CTR ELECTR & ELECT ENGN,GAITHERSBURG,MD 20899

[5] ROYAL SIGNALS & RADAR ESTAB,MALVERN WR14 3PS,WORCS,ENGLAND

[6] WACKER CHEMITRON,BURGHAUSEN,FED REP GER

[7] TOSHIBA CORP,RES & DEV,TOKYO,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 07期

关键词：

D O I：

10.1149/1.2097135

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2015 / 2024

页数：10

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