THE OPTOGALVANIC EFFECT IN A 13.56-MHZ CHLORINE DISCHARGE

被引：23

作者：

KRAMER, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 09期

关键词：

D O I：

10.1063/1.337763

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3072 / 3080

页数：9

共 22 条

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