EFFECTS OF HYDROGEN DILUTION OF SILANE ON PROPERTIES OF GLOW-DISCHARGED UNDOPED HYDROGENATED SILICON

被引：15

作者：

SHIRAFUJI, J

NAGATA, S

KUWAGAKI, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 03期

关键词：

D O I：

10.1143/JJAP.25.336

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：336 / 344

页数：9

共 31 条

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