REMOVAL OF OIL FROM METALS BY PLASMA TECHNIQUES

被引:21
作者
BELKIND, A [1 ]
KROMMENHOEK, S [1 ]
LI, H [1 ]
ORBAN, Z [1 ]
JANSEN, F [1 ]
机构
[1] AIRCO COATING TECHNOL,CONCORD,CA 94524
关键词
D O I
10.1016/0257-8972(94)90257-7
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A plasma source that can be linearly scaled has been developed for the removal of rolling oils from metal surfaces in reactive plasmas. In this paper, the design and performance of this source are presented. Surface cleanliness is evaluated by the contact angle with water. The effect of oxygen plasma on oil removal is further investigated by X-ray photoelectron spectroscopy. The cleaning process is illustrated using aluminum and stainless steel foils.
引用
收藏
页码:804 / 808
页数:5
相关论文
共 35 条
[1]   PLASMA CLEANING AND THE REMOVAL OF CARBON FROM METAL-SURFACES [J].
BAKER, MA .
THIN SOLID FILMS, 1980, 69 (03) :359-368
[2]   SUPERHIGH-RATE PLASMA-JET ETCHING OF SILICON [J].
BARDOS, L ;
BERG, S ;
BLOM, HO .
APPLIED PHYSICS LETTERS, 1989, 55 (16) :1615-1617
[3]   PLASMA-JET DRY ETCHING USING DIFFERENT ELECTRODE CONFIGURATIONS [J].
BARKLUND, AM ;
BLOM, HO ;
BERG, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03) :1055-1057
[4]   PLASMA TREATMENT FOR CLEANING OF METAL PARTS [J].
FESSMANN, J ;
GRUNWALD, H .
SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3) :290-296
[5]  
Flamm D. L., 1989, PLASMA ETCHING INTRO, P1
[6]  
GRIMM W, 1993, 7TH P INT C VAC WEB, P162
[7]  
HOFMANN D, 1992, THIN SOLID FILMS, V54, P586
[8]   SOME CHARACTERISTICS AND USES OF LOW-PRESSURE PLASMAS IN MATERIALS SCIENCE [J].
HOLLAND, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :5-15
[9]   HOLLOW-CATHODE REACTIVE SPUTTER ETCHING - A NEW HIGH-RATE PROCESS [J].
HORWITZ, CM .
APPLIED PHYSICS LETTERS, 1983, 43 (10) :977-979
[10]  
HORWITZ CM, 1987, J VAC SCI TECHNOL A, V6, P1837