CHEMICAL VAPOR-DEPOSITION OF COGA AND PTGA2 THIN-FILMS FROM MIXED-METALORGANOMETALLIC COMPOUNDS

被引：43

作者：

CHEN, YJ

KAESZ, HD

KIM, YK

MULLER, HJ

WILLIAMS, RS

XUE, ZL

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 26期

关键词：

D O I：

10.1063/1.102370

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：2760 / 2762

页数：3

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