TAILORED-ORGANOMETALLICS AS PRECURSORS FOR THE CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY PALLADIUM AND PLATINUM THIN-FILMS

被引：123

作者：

GOZUM, JE ^{[1
]}

POLLINA, DM ^{[1
]}

JENSEN, JA ^{[1
]}

GIROLAMI, GS ^{[1
]}

机构：

[1] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 1988年 / 110卷 / 08期

关键词：

D O I：

10.1021/ja00216a073

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：2688 / 2689

页数：2

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