LASER DIRECT-WRITE METALLIZATION IN THIN PALLADIUM ACETATE FILMS

被引：87

作者：

GROSS, ME

APPELBAUM, A

GALLAGHER, PK

机构：

来源：

关键词：

D O I：

10.1063/1.338049

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1628 / 1632

页数：5

共 7 条

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[2] LASER-INITIATED MICROCHEMISTRY IN THIN-FILMS - DEVELOPMENT OF NEW TYPES OF PERIODIC STRUCTURE
FISANICK, GJ
GROSS, ME
HOPKINS, JB
FENNELL, MD
SCHNOES, KJ
KATZIR, A
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) : 1139 - 1142
[3] GALLAGHER PK, 1986, IN PRESS J THERM ANA
[4] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS
GROSS, ME
FISANICK, GJ
GALLAGHER, PK
SCHNOES, KJ
FENNELL, MD
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (09) : 923 - 925
[5] A CHEMICAL AND MECHANISTIC VIEW OF REACTION PROFILESIN LASER DIRECT-WRITE METALLIZATION IN METALLOORGANIC FILMS - GOLD
GROSS, ME
APPELBAUM, A
SCHNOES, KJ
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 529 - 533
[6] SAABESTRE EB, 1974, MODERN ELECTROPLATIN, pCH28
[7] Skapski A. C., 1970, CHEM COMMUN, P658