A CHEMICAL AND MECHANISTIC VIEW OF REACTION PROFILESIN LASER DIRECT-WRITE METALLIZATION IN METALLOORGANIC FILMS - GOLD

被引：26

作者：

GROSS, ME

APPELBAUM, A

SCHNOES, KJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.337442

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：529 / 533

页数：5

共 15 条

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[10] LASER-INITIATED DEPOSITION REACTIONS - MICROCHEMISTRY IN ORGANOGOLD POLYMER-FILMS [J].

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APPLIED PHYSICS LETTERS, 1985, 47 (09) :923-925

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