SURFACE ORIENTATION AND STACKING-FAULT GENERATION IN STRAINED EPITAXIAL-GROWTH

被引:53
作者
KVAM, EP [1 ]
HULL, R [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.354033
中图分类号
O59 [应用物理学];
学科分类号
摘要
It has been observed that partial dislocation glide and stacking fault introduction occur in diamond cubic materials during tensile mismatched growth on (001) and compressive mismatched growth on (110) and (111). For reversed sense of mismatch, however, only full lattice dislocations are observed for strain relief. The general criteria are presented for when a partial misfit dislocation is possible as a function of growth surface orientation. It is shown that, for zero stacking fault energy, the slip regime (dislocation type) expected during (001) growth will hold for any growth orientation (hkl) for which 0 less-than-or-equal-to h less-than-or-equal-to k less-than-or-equal-to l/2, and the opposite regime should occur for (hkl) when l less-than-or-equal-to k/2 less-than-or-equal-to l. Effects of heterointerfacial line tension and stacking fault energy are also considered.
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页码:7407 / 7411
页数:5
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