EPITAXY OF THIN MONOCRYSTALLINE LAYERS OF GERMANIUM BY CHEMICAL VAPOR TRANSPORT IN A DIFFUSIONAL FLOW

被引:4
作者
LANGLAIS, F
LAUNAY, JC
POUCHARD, M
HAGENMULLER, P
机构
关键词
D O I
10.1016/0022-0248(83)90018-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:145 / 160
页数:16
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