ADVANCING THE STATE-OF-THE-ART IN HIGH-PERFORMANCE LOGIC AND ARRAY TECHNOLOGY

被引：11

作者：

BROWN, KH

GROSE, DA

LANGE, RC

NING, TH

TOTTA, PA

机构：

[1] IBM CORP, TECHNOL PROD, ESSEX JCT, VT 05452 USA

[2] IBM CORP, DIV RES, TJ WATSON RES CTR, YORKTOWN HTS, NY 10598 USA

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1992年 / 36卷 / 05期

关键词：

D O I：

10.1147/rd.365.0821

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

High-speed silicon bipolar technology continues to meet the demands of integrated circuits for mainframe computers. IBM has developed an advanced bipolar logic and high-speed array technology for its Enterprise System/9000TM systems. This technology, code-named ATX-4, is composed of trench-isolated, double-polysilicon self-aligned bipolar devices, and has four fully planarized wiring levels with interlevel connecting studs. Chip fabrication has been implemented in 1-mum ground rules and is in full-scale manufacturing. ATX-4 represents a significant advance in providing higher-speed and lower-power logic at increased levels of integration compared with that of the ATX-1 technology used in previous generations. An overview of the design and integration of ATX-4 is discussed.

引用

页码：821 / 828

页数：8

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