共 49 条
[1]
GAAS AND ALGAAS ANISOTROPIC FINE PATTERN ETCHING USING A NEW REACTIVE ION-BEAM ETCHING SYSTEM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:402-405
[2]
BARNHAM RD, 1979, INTEGRATED OPTICAL D, V2, P95
[3]
Bergh A., 1976, LIGHT EMITTING DIODE
[5]
FUJIMOTO I, 1984, 16TH C SOL DEV MAT K, P165
[6]
FUKUDA T, 1983, JPN J APPL PHYS S, V22, P413
[7]
FUKUNAGA T, 1985, 12TH P INT S GAAS RE, P439
[10]
HASHIMOTO H, 1984, 16TH C SOL STAT DEV, P121