THE ROLE OF DRYING-CONTROL CHEMICAL ADDITIVES ON THE PREPARATION OF SOL-GEL DERIVED PLZT THIN-FILMS

被引:26
作者
CHANG, DA [1 ]
CHOH, YH [1 ]
HSIEH, WF [1 ]
LIN, P [1 ]
TSENG, TY [1 ]
机构
[1] NATL CHIAO TUNG UNIV,COLL ENGN,HSINCHU 30042,TAIWAN
关键词
D O I
10.1007/BF00356416
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Films of Pbx/100La(x)/100(Zry/100 Tiz/100)1-x/400O3 with x = 8, y = 65 and z = 35 (PLZT(8/65/35)) with a single perovskite structural phase were successfully prepared by using drying-control chemical additives in sol-gel processing followed by rapid thermal annealing at 600-degrees-C for only 1 min on Si(Pt) substrates. The roles of the drying-control chemical additives ethylene glycol and formamide in the gel preparation were studied. The hysteresis loop of PLZT(8/65/35) thin film was measured. The remanent polarization and coercive field were found to be about 1.3 muC cm-2 and 15 kV cm-1, respectively.
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页码:6691 / 6698
页数:8
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