DIRECT-CURRENT HOLLOW-CATHODE GLOW-DISCHARGE PLASMA-ENHANCED-CHEMICAL-VAPOUR-DEPOSITION TECHNIQUE FOR A SI-H THIN-FILM PRODUCTION

被引：6

作者：

MATSUMURA, S

SAKURAI, K

BEREZIN, AA

HOBSON, RM

TEII, S

CHANG, JS

机构：

[1] YORK UNIV,DEPT PHYS,DOWNSVIEW M3J 1P3,ONTARIO,CANADA

[2] MUSASHI INST TECHNOL,DEPT ELECT ENGN,TOKYO 158,JAPAN

来源：

CANADIAN JOURNAL OF PHYSICS | 1985年 / 63卷 / 06期

关键词：

D O I：

10.1139/p85-133

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：826 / 830

页数：5

共 21 条

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