THE PREPARATION AND SOME PROPERTIES OF TRANSPARENT CONDUCTING ZNO FOR USE IN SOLAR-CELLS

被引：89

作者：

MORGAN, JH

BRODIE, DE

机构：

来源：

CANADIAN JOURNAL OF PHYSICS | 1982年 / 60卷 / 10期

关键词：

SOLAR CELLS;

D O I：

10.1139/p82-186

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The fabrication of transparent conducting films of ZnO is described. These films are deposited on room temperature glass substrates using an enhanced reactive evaporation technique in which the power in a dc glow discharge, the oxygen pressure, and the zinc evaporation rate are controlled separately. Each of these parameters is adjusted to optimize the required film property.

引用

页码：1387 / 1390

页数：4

共 5 条

[1]

Fahrenbruch A. L., 1978, Thirteenth IEEE Photovoltaic Specialists Conference1978, P281

[2] TRANSPARENT CONDUCTING COATINGS [J].

HAACKE, G .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 :73-93

[3]

SCHEWCHUN J, 1978, 13TH P IEEE PHOT SPE, P528

[4]

Vossen J. L., 1977, PHYS THIN FILMS, V9, P1

[5] TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING [J].

WEBB, JB ;

WILLIAMS, DF ;

BUCHANAN, M .

APPLIED PHYSICS LETTERS, 1981, 39 (08) :640-642

← 1 →