TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING

被引：182

作者：

WEBB, JB ^{[1
]}

WILLIAMS, DF ^{[1
]}

BUCHANAN, M ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,SOLAR ENERGY PROJECT,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 08期

关键词：

D O I：

10.1063/1.92815

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：640 / 642

页数：3

共 9 条

[1]

Brodie D. E., 1980, Fourteenth IEEE Photovoltaic Specialists Conference 1980, P468

[2] PREPARATION OF CONDUCTING AND TRANSPARENT THIN-FILMS OF TIN-DOPED INDIUM OXIDE BY MAGNETRON SPUTTERING [J].

BUCHANAN, M ;

WEBB, JB ;

WILLIAMS, DF .

APPLIED PHYSICS LETTERS, 1980, 37 (02) :213-215

[3]

BUCHANAN M, THIN SOLID FILMS

[4] INFLUENCE OF DEFECTS ON THE ELECTRONIC-STRUCTURE OF ZINC-OXIDE SURFACES [J].

GOPEL, W ;

LAMPE, U .

PHYSICAL REVIEW B, 1980, 22 (12) :6447-6462

[5]

MACKRODT WC, 1980, J PHYS C SOLID STATE, V41, P64

[6] ELECTRICAL AND OPTICAL-PROPERTIES OF IN2O3-SN FILMS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].

NATH, P ;

BUNSHAH, RF ;

BASOL, BM ;

STAFFSUD, OM .

THIN SOLID FILMS, 1980, 72 (03) :463-468

[7]

PAN CA, 1980, APPL PHYS LETT, V37, P164

[8] ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS [J].

SHANTHI, E ;

DUTTA, V ;

BANERJEE, A ;

CHOPRA, KL .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6243-6251

[9] REACTIVE MAGNETRON DEPOSITION OF TRANSPARENT CONDUCTIVE FILMS [J].

SMITH, JF ;

ARONSON, AJ ;

CHEN, D ;

CLASS, WH .

THIN SOLID FILMS, 1980, 72 (03) :469-474

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