REACTIVE MAGNETRON DEPOSITION OF TRANSPARENT CONDUCTIVE FILMS

被引：58

作者：

SMITH, JF

ARONSON, AJ

CHEN, D

CLASS, WH

机构：

来源：

THIN SOLID FILMS | 1980年 / 72卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90533-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：469 / 474

页数：6

相关论文

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[4] Vossen J. L., 1977, PHYS THIN FILMS, V9, P1
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