DIODES FORMED BY LASER DRILLING AND DIFFUSION

被引：9

作者：

ANTHONY, TR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.330427

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：9154 / 9164

页数：11

共 26 条

[1] DEEP-DIODE ARRAYS [J].

ANTHONY, TR ;

CLINE, HE .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) :2550-2557

[2] FORMING FEEDTHROUGHS IN LASER-DRILLED HOLES IN SEMICONDUCTOR WAFERS BY DOUBLE-SIDED SPUTTERING [J].

ANTHONY, TR .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1982, 5 (01) :171-180

[3] RANDOM-WALK OF LIQUID DROPLETS MIGRATING IN SILICON [J].

ANTHONY, TR ;

CLINE, HE .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) :2316-2324

[4] THERMOMIGRATION PROCESSING OF ISOLATION GRIDS IN POWER STRUCTURES [J].

ANTHONY, TR ;

BOAH, JK ;

CHANG, MF ;

CLINE, HE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (08) :818-823

[5] THE REVERSE LASER DRILLING OF TRANSPARENT MATERIALS [J].

ANTHONY, TR ;

LINDNER, PA .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) :5970-5975

[6] FORMING ELECTRICAL INTERCONNECTIONS THROUGH SEMICONDUCTOR WAFERS [J].

ANTHONY, TR .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (08) :5340-5349

[7] STRESSES GENERATED BY THE THERMOMIGRATION OF LIQUID INCLUSIONS IN SILICON [J].

ANTHONY, TR ;

CLINE, HE .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) :5774-5782

[8]

ANTHONY TR, 1981, J APPL PHYS, V51, P6356

[9]

ANTHONY TR, 1981, J APPL PHYS, V51, P1170

[10]

Bennett C.O., 1974, MOMENTUM HEAT MASS T

← 1 2 3 →