SILICON LATTICE-CONSTANT - LIMITS IN IMGC X-RAY OPTICAL INTERFEROMETRY

被引：20

作者：

BASILE, G ^{[1
]}

BERGAMIN, A ^{[1
]}

CAVAGNERO, G ^{[1
]}

MANA, G ^{[1
]}

VITTONE, E ^{[1
]}

ZOSI, G ^{[1
]}

机构：

[1] UNIV TURIN,IST FIS GEN A AUOGADRO,I-10125 TURIN,ITALY

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1991年 / 40卷 / 02期

关键词：

D O I：

10.1109/TIM.1990.1032891

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper analyzes the resolution and accuracy achievable in the IMGC experiment for the measurement of the silicon lattice spacing by scanning x-ray interferometry. This study has been prompted by the observation of a discrepancy when our result was compared with those obtained by other research groups. The article contains an analysis of the maximum resolution achievable, of the aberration effects, and of the measurement procedure. The steps taken to reduce the overall uncertainty to a few parts in 10(8) are described.

引用

页码：98 / 102

页数：5

共 19 条

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