INTEGRATION OF AN STM IN AN SEM

被引：11

作者：

TROYON, M

LEI, HN

BOURHETTAR, A

机构：

[1] Laboratoire de Microscopie Electronique, INSERM 314, 51100 Reims

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90484-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A scanning tunneling microscope has been incorporated in a usual scanning electron microscope. The specimen coarse positioner has three degrees of motion allowing one to choose any particular zone in a 2 x 2 mm specimen. The STM/SEM combined instrument is able to resolve graphite atoms and covers a wide range of magnification from 30 to 10(8).

引用

页码：1564 / 1568

页数：5

共 8 条

[1] SCANNING TUNNELING MICROSCOPY OF RECA-DNA COMPLEXES COATED WITH A CONDUCTING FILM
AMREIN, M
STASIAK, A
GROSS, H
STOLL, E
TRAVAGLINI, G
[J]. SCIENCE, 1988, 240 (4851) : 514 - 516
[2] SEM STM COMBINATION FOR STM TIP GUIDANCE
ANDERS, M
MUCK, M
HEIDEN, C
[J]. ULTRAMICROSCOPY, 1988, 25 (02) : 123 - 128
[3] A SCANNING TUNNELING MICROSCOPE SCANNING ELECTRON-MICROSCOPE SYSTEM FOR THE FABRICATION OF NANOSTRUCTURES
EHRICHS, EE
SMITH, WF
DELOZANNE, AL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 1380 - 1383
[4] SURFACE INVESTIGATIONS WITH A COMBINED SCANNING ELECTRON SCANNING TUNNELING MICROSCOPE
FUCHS, H
LASCHINSKI, R
[J]. SCANNING, 1990, 12 (03) : 126 - 132
[5] SCANNING TUNNELING MICROSCOPE COMBINED WITH A SCANNING ELECTRON-MICROSCOPE
GERBER, C
BINNIG, G
FUCHS, H
MARTI, O
ROHRER, H
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (02) : 221 - 224
[6] SCANNING TUNNELING MICROSCOPE COMBINED WITH SCANNING ELECTRON-MICROSCOPE
ICHINOKAWA, T
MIYAZAKI, Y
KOGA, Y
[J]. ULTRAMICROSCOPY, 1987, 23 (01) : 115 - 118
[7] SCANNING TUNNELING MICROSCOPE WITH RELIABLE COARSE POSITIONERS
TAKATA, K
HOSOKI, S
HOSAKA, S
TAJIMA, T
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (04) : 789 - 791
[8] VASQUEZ L, 1988, REV SCI INSTRUM, V59, P1286

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