CHEMISTRY OF SPUTTERED MOLYBDENUM-DISULFIDE FILMS

被引：95

作者：

STEWART, TB ^{[1
]}

FLEISCHAUER, PD ^{[1
]}

机构：

[1] AEROSPACE CORP,CHEM & PHYS LAB,EL SEGUNDO,CA 90245

来源：

关键词：

D O I：

10.1021/ic00136a060

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

引用

页码：2426 / 2431

页数：6

共 14 条

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[5] STICKING PROBABILITIES REDISTRIBUTION PHENOMENA AND DESORPTION SPECTRA FOR NITROGEN ON MOLYBDENUM AND TITANIUM FILMS
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[7] NISHIMURA M, 1978, 2ND P INT C SOL LUBR, P128
[8] SURFACE OXIDATION OF MOLYBDENUM DISULFIDE
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