THE EARLY STAGES OF RUTHENIUM OXIDATION

被引:72
作者
HRBEK, J
VANCAMPEN, DG
MALIK, IJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579573
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1409 / 1412
页数:4
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