INSITU PROTON-INDUCED X-RAY-EMISSION AND AUGER-ELECTRON SPECTROSCOPY STUDY OF TITANIUM AND NIOBIUM IMPLANTATION OF IRON FILMS

被引：8

作者：

SARTWELL, BD

BALDWIN, DA

机构：

[1] US Naval Research Lab, Washington,, DC, USA, US Naval Research Lab, Washington, DC, USA

来源：

MATERIALS SCIENCE AND ENGINEERING | 1985年 / 69卷 / 02期

关键词：

D O I：

10.1016/0025-5416(85)90356-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：539 / 547

页数：9

共 12 条

[1]

BALDWIN DA, UNPUB NUCL INSTRUM M

[2]

BASSEL RH, UNPUB

[3] CHARACTERIZATION OF THIN-FILMS ON METALS USING PROTON-INDUCED X-RAYS [J].

CAMPBELL, AB ;

SARTWELL, BD .

THIN SOLID FILMS, 1979, 64 (03) :445-454

[4]

DAVIS LE, 1976, HDB AUGER ELECTRON S

[5] MECHANICAL AND CHEMICAL-PROPERTIES OF TANTALUM-IMPLANTED STEELS [J].

HUBLER, GK ;

SINGER, IL ;

CLAYTON, CR .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :203-210

[6]

HUBLER GK, 1982, MATERIALS RES SOC S, V7, P341

[7]

MAYER JW, 1977, ION BEAM HDB MATERIA

[8] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

PHYSICAL REVIEW, 1969, 184 (02) :383-+

[9] CARBURIZATION OF STEEL SURFACES DURING IMPLANTATION OF TI IONS AT HIGH FLUENCES [J].

SINGER, IL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :419-422

[10] ABSORPTION OF CARBON FROM RESIDUAL GASES DURING TI IMPLANTATION OF ALLOYS [J].

SINGER, IL ;

BARLAK, TM .

APPLIED PHYSICS LETTERS, 1983, 43 (05) :457-459

← 1 2 →