LOW-ENERGY ELECTRON-BEAM APPLICATIONS FOR REACTIONS IN METAL SILICON SYSTEMS

被引:2
作者
DANNA, E
LEGGIERI, G
LUCHES, A
MAJNI, G
NAVA, F
PERRONE, A
机构
来源
RADIATION PHYSICS AND CHEMISTRY | 1983年 / 22卷 / 3-5期
关键词
D O I
10.1016/0146-5724(83)90099-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:803 / 809
页数:7
相关论文
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PERRONE, MR .
PHYSICA B & C, 1981, 104 (1-2) :228-232
[4]   ELECTRON-BEAM INDUCED REACTIONS IN METAL SI SYSTEMS [J].
MAJNI, G ;
NAVA, F ;
OTTAVIANI, G ;
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NASSISI, V ;
CELOTTI, G .
VACUUM, 1982, 32 (01) :11-18
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