ELECTRON-BEAM INDUCED REACTIONS IN METAL SI SYSTEMS

被引：21

作者：

MAJNI, G

NAVA, F

OTTAVIANI, G

LUCHES, A

NASSISI, V

CELOTTI, G

机构：

[1] UNIV LECCE,IST FIS,I-73100 LECCE,ITALY

[2] INST LAMEL,CNR,BOLOGNA,ITALY

来源：

VACUUM | 1982年 / 32卷 / 01期

关键词：

D O I：

10.1016/S0042-207X(82)80189-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：11 / 18

页数：8

共 9 条

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[2]

CLAASSEN RS, 1976, PHYS TODAY, P23

[3]

FERRIS SD, 1979, LASER SOLID INTERACT

[4]

Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[5] EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J].

LAU, SS ;

CHU, WK ;

MAYER, JW ;

TU, KN .

THIN SOLID FILMS, 1974, 23 (02) :205-213

[6] REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J].

OTTAVIANI, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1112-1119

[7]

Shunk F. A., 1969, CONSTITUTION BINAR S

[8]

WHITE CW, 1980, LASER ELECTRON BEAM

[9] THE THERMAL-STABILITY OF LASER-PRODUCED SILICIDE LAYERS [J].

WITTMER, M ;

LUTHY, W ;

VONALLMEN, M .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5386-5389

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