EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION

[1] BOWER RW, 1973, SOLID STATE ELECTRON, V16, P1461, DOI 10.1016/0038-1101(73)90063-4

[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &

[3] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[4] SEEMAN-BOHLIN X-RAY DIFFRACTOMETER FOR THIN FILMS [J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1970, 3 (OCT1) : 372 - &

[5] GROWTH AND TRANSFORMATION OF PD2SI ON (111), (110) AND (100) SI [J]. THIN SOLID FILMS, 1973, 18 (02) : 343 - 363

[6] METALLURGICAL PROPERTIES AND ELECTRICAL CHARACTERISTICS OF PALLADIUM SILICIDE-SILICON CONTACTS [J]. SOLID-STATE ELECTRONICS, 1971, 14 (06) : 507 - +

[7] Lepselter M. P., 1969, Ohmic contacts to semiconductors, P159

[8] COMPARISON OF SURFACE-LAYER ANALYSIS TECHNIQUES [J]. THIN SOLID FILMS, 1973, 19 (01) : 1 - 10

[9] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 86 - 93

[10] SOLID-SOLID REACTIONS IN PT-SI SYSTEMS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2913 - +

[1] BOWER RW, 1973, SOLID STATE ELECTRON, V16, P1461, DOI 10.1016/0038-1101(73)90063-4

[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &

[3] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41

[4] SEEMAN-BOHLIN X-RAY DIFFRACTOMETER FOR THIN FILMS [J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1970, 3 (OCT1) : 372 - &

[5] GROWTH AND TRANSFORMATION OF PD2SI ON (111), (110) AND (100) SI [J]. THIN SOLID FILMS, 1973, 18 (02) : 343 - 363

[6] METALLURGICAL PROPERTIES AND ELECTRICAL CHARACTERISTICS OF PALLADIUM SILICIDE-SILICON CONTACTS [J]. SOLID-STATE ELECTRONICS, 1971, 14 (06) : 507 - +

[7] Lepselter M. P., 1969, Ohmic contacts to semiconductors, P159

[8] COMPARISON OF SURFACE-LAYER ANALYSIS TECHNIQUES [J]. THIN SOLID FILMS, 1973, 19 (01) : 1 - 10

[9] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 86 - 93

[10] SOLID-SOLID REACTIONS IN PT-SI SYSTEMS [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2913 - +