COMPARISON OF SURFACE-LAYER ANALYSIS TECHNIQUES

被引：32

作者：

MAYER, JW ^{[1
]}

TUROS, A ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91109

来源：

THIN SOLID FILMS | 1973年 / 19卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90020-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1 / 10

页数：10

相关论文

共 29 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF
AMSEL, G
NADAI, JP
DARTEMAR.E
DAVID, D
GIRARD, E
MOULIN, J
[J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 481 - &
[2] ANALYSIS OF SURFACE-LAYERS BY LIGHT ION BACKSCATTERING AND SPUTTERING COMBINED WITH AUGER-ELECTRON SPECTROSCOPY (AES)
BEHRISCH, R
SCHERZER, BM
STAIB, P
[J]. THIN SOLID FILMS, 1973, 19 (01) : 57 - 67
[3] BIRKS LS, 1963, ELECTRON PROBE MICRO
[4] ASSESSMENT OF ION-INDUCED X-RAYS FOR ANALYSIS
CAIRNS, JA
MARWICK, AD
MITCHELL, IV
[J]. THIN SOLID FILMS, 1973, 19 (01) : 91 - 102
[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS
CHU, WK
MAYER, JW
NICOLET, MA
BUCK, TM
AMSEL, G
EISEN, F
[J]. THIN SOLID FILMS, 1973, 17 (01) : 1 - 41
[6] USE OF FOCUSED ION-BEAMS FOR ANALYSIS
COOKSON, JA
PILLING, FD
[J]. THIN SOLID FILMS, 1973, 19 (02) : 381 - 385
[7] SECONDARY ION MASS ANALYSIS - TECHNIQUE FOR 3-DIMENSIONAL CHARACTERIZATION
EVANS, CA
[J]. ANALYTICAL CHEMISTRY, 1972, 44 (13) : A67 - &
[8] ION PROBE MASS-SPECTROMETRY - OVERVIEW
EVANS, CA
[J]. THIN SOLID FILMS, 1973, 19 (01) : 11 - 19
[9] COMBINED USE OF HE BACKSCATTERING AND HE-INDUCED X-RAYS IN STUDY OF ANODICALLY GROWN OXIDE-FILMS ON GAAS
FELDMAN, LC
POATE, JM
ERMANIS, F
SCHWARTZ, B
[J]. THIN SOLID FILMS, 1973, 19 (01) : 81 - 89
[10] PROTON-INDUCED X-RAY CROSS-SECTIONS FOR SELECTED ELEMENTS FE TO AS AND APPLICATIONS OF X-RAY ANALYSIS TO SEMICONDUCTOR SYSTEMS
GRAY, TJ
LEAR, R
DEXTER, RJ
SCHWETTMANN, FN
WIEMER, KC
[J]. THIN SOLID FILMS, 1973, 19 (01) : 103 - 119