RAMAN AND X-RAY STUDIES OF POLYCRYSTALLINE CVD DIAMOND FILMS

被引:70
作者
BACHMANN, PK [1 ]
BAUSEN, HD [1 ]
LADE, H [1 ]
LEERS, D [1 ]
WIECHERT, DU [1 ]
HERRES, N [1 ]
KOHL, R [1 ]
KOIDL, P [1 ]
机构
[1] FRAUNHOFER INST APPL SOLID STATE PHYS,D-79108 FREIBURG,GERMANY
关键词
D O I
10.1016/0925-9635(94)90143-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Differently prepared microwave plasma-deposited diamond films with a broad spectrum of morphological and Raman spectroscopic features were investigated by scanning electron microscopy (SEM), Raman spectroscopy and X-ray diffraction (XRD). XRD indicates the presence of graphitic polytypes in most samples, independent of growth conditions or morphology. X-ray texture analysis reveals pronounced fibre textures not only for well-faceted deposits, but also for smooth, fine grain films. Information about internal strain, stacking faults and average crystallite sizes is obtained from diffraction peak shifts and widths. Crystallite sizes deduced from XRD profiles are found to be orders of magnitudes smaller than the grain sizes observed by SEM. An analysis of the diamond Raman peak position, width and shape suggests that Raman peak broadening is dominated by phonon lifetime reduction. Raman and X-ray diffraction data reveal a reciprocal relationship between the width of the diamond Raman line and the crystallite size.
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页码:1308 / 1314
页数:7
相关论文
共 18 条
  • [1] SPATIALLY RESOLVED RAMAN STUDIES OF DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION
    AGER, JW
    VEIRS, DK
    ROSENBLATT, GM
    [J]. PHYSICAL REVIEW B, 1991, 43 (08): : 6491 - 6499
  • [2] Bachmann P.K., 1988, MRS S P EA, VEA-15, P99
  • [3] OPTICAL CHARACTERIZATION OF DIAMOND
    BACHMANN, PK
    WIECHERT, DU
    [J]. DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 422 - 433
  • [4] POSTDEPOSITIONAL DIAMOND ETCHING
    BACHMANN, PK
    LEERS, D
    WIECHERT, DU
    [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) : 683 - 693
  • [5] TOWARDS A GENERAL CONCEPT OF DIAMOND CHEMICAL VAPOR-DEPOSITION
    BACHMANN, PK
    LEERS, D
    LYDTIN, H
    [J]. DIAMOND AND RELATED MATERIALS, 1991, 1 (01) : 1 - 12
  • [6] DIAMOND DEPOSITION TECHNOLOGIES
    BACHMANN, PK
    VANENCKEVORT, W
    [J]. DIAMOND AND RELATED MATERIALS, 1992, 1 (10-11) : 1021 - 1034
  • [7] DEFECTS AND STRESS-ANALYSIS OF THE RAMAN-SPECTRUM OF DIAMOND FILMS
    GHEERAERT, E
    DENEUVILLE, A
    BONNOT, AM
    ABELLO, L
    [J]. DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) : 525 - 528
  • [8] GLOCKER R, 1971, MATERIALPRUFUNG RONT, P409
  • [9] CHARACTERIZATION OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY
    KNIGHT, DS
    WHITE, WB
    [J]. JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) : 385 - 393
  • [10] LEGRICE YM, 1990, MATER RES SOC SYMP P, V162, P219, DOI 10.1557/PROC-162-219