RHEED AND REM STUDY OF SI(111) SURFACE DEGRADATION UNDER AR BOMBARDMENT

被引:7
作者
CLAVERIE, A
FAURE, J
VIEU, C
BEAUVILLAIN, J
JOUFFREY, B
机构
来源
JOURNAL DE PHYSIQUE | 1986年 / 47卷 / 10期
关键词
D O I
10.1051/jphys:0198600470100180500
中图分类号
学科分类号
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页码:1805 / 1812
页数:8
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