CHARGING OF INSULATORS BY ION-BOMBARDMENT AND ITS MINIMIZATION FOR SECONDARY ION MASS-SPECTROMETRY (SIMS) MEASUREMENTS

被引:134
作者
WERNER, HW [1 ]
MORGAN, AE [1 ]
机构
[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS
关键词
D O I
10.1063/1.322845
中图分类号
O59 [应用物理学];
学科分类号
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页码:1232 / 1242
页数:11
相关论文
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Ueda Y., 1972, Mass Spectroscopy, V20, P185
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Werner H. W., 1973, Radiation Effects, V18, P269, DOI 10.1080/00337577308232134