DIAMOND GROWTH IN A NOVEL LOW-PRESSURE FLAME

被引：8

作者：

GLUMAC, NG

GOODWIN, DG

机构：

[1] Division of Engineering and Applied Science, California Institute of Technology, Pasadena

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 21期

关键词：

D O I：

10.1063/1.106876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamond growth using a new low-pressure combustion technique is reported. A large-area hydrogen/oxygen flame is used as the source of atomic hydrogen. Methane diluted in hydrogen is injected into the flame near a heated silicon substrate, on which diamond crystallites nucleate and grow. This technique is potentially capable of large-area film growth, since atomic hydrogen can be generated uniformly over arbitrarily large areas.

引用

页码：2695 / 2696

页数：2