MATHEMATICAL-MODELING OF THROUGH-HOLE-PLATING IN ELECTROCHEMICAL MICROFABRICATION

被引:4
作者
CHERN, JWE [1 ]
CHEH, HY [1 ]
机构
[1] COLUMBIA UNIV,DEPT CHEM ENGN & APPL CHEM,NEW YORK,NY 10027
关键词
AXISYMMETRICAL FLOW; CYLINDRICAL GEOMETRY; CONVECTIVE MASS TRANSFER; CONCENTRATION BOUNDARY LAYER;
D O I
10.1080/00986449208936023
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
引用
收藏
页码:191 / 203
页数:13
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