THE EFFECT OF GROSS ROUGHNESS ON ELLIPSOMETRY

被引：5

作者：

SMITH, T

机构：

来源：

JOURNAL OF ELECTROANALYTICAL CHEMISTRY | 1983年 / 150卷 / 1-2期

关键词：

D O I：

10.1016/S0022-0728(83)80210-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：277 / 290

页数：14

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