共 32 条
- [1] BORN M, 1980, PRINCIPLES OPTICS, P534
- [2] CERRINA F, 1990, SYNCHROTRON RAD NEWS, V3, P15
- [3] CHIN SL, 1991, J VAC SCI TECHNOL, V9, P3297
- [5] FLEMING D, 1992, IN PRESS EIPB
- [6] GASKILL JD, 1978, LINEAR SYSTEMS FOURI, P360
- [7] AERIAL IMAGE-FORMATION IN SYNCHROTRON-RADIATION-BASED X-RAY-LITHOGRAPHY - THE WHOLE PICTURE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1551 - 1556
- [8] VERIFICATION OF PARTIALLY COHERENT-LIGHT DIFFRACTION MODELS IN X-RAY-LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3207 - 3213
- [9] GUO JZY, 1992, IN PRESS J VAC SCI B, V10
- [10] GUO JZY, 1992, P SPIE