XPS STUDY OF ION-BEAM IRRADIATION EFFECTS IN POLYIMIDE LAYERS

被引：15

作者：

KARPUZOV, D

KOSTOV, KL

VENKOVA, E

KIROVA, P

KATARDJIEV, I

CARTER, G

机构：

[1] BULGARIAN ACAD SCI,INST GEN & INORGAN CHEM,BU-1040 SOFIA,BULGARIA

[2] INST MICROELECTR,BU-1784 SOFIA,BULGARIA

[3] CENT LAB POLYMERS,BU-1040 SOFIA,BULGARIA

[4] UNIV SALFORD,SALFORD M5 4WT,LANCS,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90897-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：787 / 791

页数：5

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