PROPERTIES OF TIN OBTAINED BY N-2(+) IMPLANTATION ON TI-COATED SI WAFERS

被引:15
作者
ARMIGLIATO, A [1 ]
CELOTTI, G [1 ]
GARULLI, A [1 ]
GUERRI, S [1 ]
LOTTI, R [1 ]
OSTOJA, P [1 ]
SUMMONTE, C [1 ]
机构
[1] UNIV BOLOGNA,IST FIS,I-40126 BOLOGNA,ITALY
关键词
D O I
10.1063/1.93566
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:446 / 448
页数:3
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