SYNTHESIS OF NOVEL INORGANIC FILMS BY ION-BEAM IRRADIATION OF POLYMER-FILMS

被引:44
作者
VENKATESAN, T
WOLF, T
ALLARA, D
WILKENS, BJ
TAYLOR, GN
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D O I
10.1063/1.94186
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O59 [应用物理学];
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页码:934 / 936
页数:3
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