MICRO RESONANT FORCE GAUGES

被引：201

作者：

TILMANS, HAC

ELWENSPOEK, M

FLUITMAN, JHJ

机构：

[1] MESA Research Institute, University of Twente, 7500 AE Enschede

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 30卷 / 1-2期

关键词：

D O I：

10.1016/0924-4247(92)80194-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.

引用

页码：35 / 53

页数：19

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