MECHANICAL FATIGUE IN THIN-FILMS INDUCED BY PIEZOELECTRIC STRAINS AS A CAUSE OF FERROELECTRIC FATIGUE

被引:34
作者
KHACHATURYAN, K
机构
[1] Center for Materials Science, Los Alamos National Laboratory, Los Alamos
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.359118
中图分类号
O59 [应用物理学];
学科分类号
摘要
It is proposed that the ferroelectric fatigue is caused by alternating mechanical stresses induced piezoelectrically. It is shown that the mechanical stresses that develop upon switching are sufficient to cause significant mechanical fatigue after the similar number of cycles after which the ferroelectric fatigue is typically observed. It is proposed that the degradation of the ferroelectric properties is a direct consequence of the mechanical fatigue. It is attempted to explain some of the reported correlations between ferroelectric fatigue and microstructure, temperature, test conditions, and electrode material. It is proposed that electromigration and chemomechanical effect are essential in the mechanism of the effect of electrode material on ferroelectric fatigue. © 1995 American Institute of Physics.
引用
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页码:6449 / 6455
页数:7
相关论文
共 61 条
[31]  
MOAZZAMI R, 1990, 1990 P IEEE ANN INT, P231
[32]  
MOAZZAMI R, 1990, IEEE IEDM, V90, P417
[33]   AUGER-ELECTRON SPECTROSCOPY STUDY ON THE STABILITY AND THE INTERFACIAL REACTION OF TA, TA-N AND TAN FILMS AS A DIFFUSION BARRIER BETWEEN CU9AL4 FILM AND SI [J].
NOYA, A ;
SASAKI, K ;
TAKEYAMA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (02) :911-915
[34]   ELECTROMECHANICAL STRENGTH AND FATIGUE OF FERROELECTRIC CERAMICS [J].
OKAZAKI, K ;
TANIMOTO, T .
FERROELECTRICS, 1992, 131 (1-4) :25-40
[35]  
PAN W, 1993, FERROELECTRICS, V133, P97
[36]  
PAN W, 1991, 3RD P INT S INT FERR, P335
[37]  
Pertsev N. V., 1970, FIZ KHIM OBRA MATER, V2, P60
[38]  
PLUMLEE R, 1967, SCRR67730 SAND LAB R
[39]  
PUSKAR A, 1985, MATERIALS SCI MONOGR, V24
[40]   ORIENTED FERROELECTRIC LA-SR-CO-O/PB-LA-ZR-TI-O/LA-SR-CO-O HETEROSTRUCTURES ON [001] PT/SIO2 SI SUBSTRATES USING A BISMUTH TITANATE TEMPLATE LAYER [J].
RAMESH, R ;
LEE, J ;
SANDS, T ;
KERAMIDAS, VG ;
AUCIELLO, O .
APPLIED PHYSICS LETTERS, 1994, 64 (19) :2511-2513