METHOD FOR PRODUCING LARGE SI FILMS FOR PRESELECTED IMPERFECTION ANALYSIS

被引：27

作者：

LAWRENCE, JE

KOEHLER, H

机构：

来源：

JOURNAL OF SCIENTIFIC INSTRUMENTS | 1965年 / 42卷 / 04期

关键词：

D O I：

10.1088/0950-7671/42/4/322

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：270 / &

相关论文

共 3 条

[1] METHOD OF PREPARING SI AND GE SPECIMENS FOR EXAMINATION BY TRANSMISSION ELECTRON MICROSCOPY
BOOKER, GR
STICKLER, R
[J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1962, 13 (09): : 446 - &
[2] STACKING FAULTS IN EPITAXIAL SILICON
QUEISSER, HJ
FINCH, RH
WASHBURN, J
[J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (04) : 1536 - &
[3] SAMPLE PREPARATION FOR TRANSMISSION ELECTRON MICROSCOPY OF GERMANIUM
RIESZ, RP
BJORLING, CG
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1961, 32 (08) : 889 - &