HIGH-RESOLUTION ELECTRON-MICROSCOPY OF SEMICONDUCTORS AND METALS

Review: Two-dimensional information on the microstructure of materials at a resolution comparable to interatomic distances is crucial for the study of interfaces, defects, growth mechanisms etc. One of the most important analytical methods for gaining such information is high-resolution electron microscopy (HREM). The interpretation of the results on semiconductors, magnetic alloys and multilayers, can often be facilitated through image processing and simulation.