CHARACTERIZATION OF BORON-DOPED DIAMOND FILM

被引：97

作者：

OKANO, K ^{[1
]}

NARUKI, H ^{[1
]}

AKIBA, Y ^{[1
]}

KUROSU, T ^{[1
]}

IIDA, M ^{[1
]}

HIROSE, Y ^{[1
]}

NAKAMURA, T ^{[1
]}

机构：

[1] NIPPON INST TECHNOL,DEPT ELECT ENGN & ELECTR,SAITAMA 345,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 06期

关键词：

D O I：

10.1143/JJAP.28.1066

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1066 / 1071

页数：6

共 6 条

[1] FIELD JE, 1979, PROPERTIES DIAMOND, P79
[2] CHARACTERIZATION OF CONDUCTING DIAMOND FILMS
FUJIMORI, N
IMAI, T
DOI, A
[J]. VACUUM, 1986, 36 (1-3) : 99 - 102
[3] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS
HIROSE, Y
TERASAWA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06): : L519 - L521
[4] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
MATSUMOTO, S
SATO, Y
KAMO, M
SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[5] SYNTHESIS OF DIAMOND THIN-FILMS HAVING SEMICONDUCTIVE PROPERTIES
OKANO, K
NARUKI, H
AKIBA, Y
KUROSU, T
IIDA, M
HIROSE, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (02): : L173 - L175
[6] SAWABE A, 1985, APPL PHYS LETT, V46, P46